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Optimal feature extraction and selection method for PdM (Predictive Maintenance) of roots-vacuum-pump in semiconductor manufacturing process
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Jun-Geol Baek | - |
| dc.date.accessioned | 2021-08-28T06:27:18Z | - |
| dc.date.available | 2021-08-28T06:27:18Z | - |
| dc.date.created | 2021-04-22 | - |
| dc.date.issued | 2017-07-19 | - |
| dc.identifier.uri | https://scholar.korea.ac.kr/handle/2021.sw.korea/23092 | - |
| dc.publisher | IFORS | - |
| dc.title | Optimal feature extraction and selection method for PdM (Predictive Maintenance) of roots-vacuum-pump in semiconductor manufacturing process | - |
| dc.title.alternative | Optimal feature extraction and selection method for PdM (Predictive Maintenance) of roots-vacuum-pump in semiconductor manufacturing process | - |
| dc.type | Conference | - |
| dc.contributor.affiliatedAuthor | Jun-Geol Baek | - |
| dc.identifier.bibliographicCitation | 21st Conference of the International Federation of Operational Research Societies (IFORS 2017) | - |
| dc.relation.isPartOf | 21st Conference of the International Federation of Operational Research Societies (IFORS 2017) | - |
| dc.relation.isPartOf | IFORS 2017 | - |
| dc.citation.title | 21st Conference of the International Federation of Operational Research Societies (IFORS 2017) | - |
| dc.citation.conferencePlace | CN | - |
| dc.citation.conferencePlace | Quebec City, Canada | - |
| dc.citation.conferenceDate | 2017-07-17 | - |
| dc.type.rims | CONF | - |
| dc.description.journalClass | 1 | - |
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