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SCOPUS
Use of neural network to model X-ray photoelectron spectroscopy data for diagnosis of plasma etch equipment
Kim, Byungwhan; Kim, Jeong;
Choi, Seongjin
Article
Issue Date
2009
Citation
EXPERT SYSTEMS WITH APPLICATIONS, v.36, no.8, pp.11347 - 11351
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PERGAMON-ELSEVIER SCIENCE LTD
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Kim, Byungwhan
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Kim, Jeong
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Choi, Seong jin
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Chemical composition
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Genetic algorithm
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Neural network
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Statistical experimental design
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X-ray photoelectron spectroscopy
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2009
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English
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scie
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scopus
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