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Si(100)에 ALD모드로 성장시킨 ZnO의 온도별 성장 메커니즘Si(100)에 ALD모드로 성장시킨 ZnO의 온도별 성장 메커니즘

Alternative Title
Si(100)에 ALD모드로 성장시킨 ZnO의 온도별 성장 메커니즘
Authors
BYUN, Dong Jin
Issue Date
18-5월-2017
Publisher
한국재료학회
Citation
2017년도 한국재료학회 춘계학술대회
URI
https://scholar.korea.ac.kr/handle/2021.sw.korea/24104
Conference Name
2017년도 한국재료학회 춘계학술대회
Place
KO
Conference Date
2017-05-17
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공과대학 (신소재공학부)
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