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The Effect of Ultraviolet on the Passivation Properties of Thermal Atomic Layer Deposited Al2O3
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Kang Yoon Mook | - |
| dc.date.accessioned | 2021-08-28T11:49:18Z | - |
| dc.date.available | 2021-08-28T11:49:18Z | - |
| dc.date.created | 2021-04-22 | - |
| dc.date.issued | 2016-11-07 | - |
| dc.identifier.uri | https://scholar.korea.ac.kr/handle/2021.sw.korea/26388 | - |
| dc.publisher | 대한금속·재료학회 | - |
| dc.title | The Effect of Ultraviolet on the Passivation Properties of Thermal Atomic Layer Deposited Al2O3 | - |
| dc.title.alternative | The Effect of Ultraviolet on the Passivation Properties of Thermal Atomic Layer Deposited Al2O3 | - |
| dc.type | Conference | - |
| dc.contributor.affiliatedAuthor | Kang Yoon Mook | - |
| dc.identifier.bibliographicCitation | ENGE 2016 | - |
| dc.relation.isPartOf | ENGE 2016 | - |
| dc.relation.isPartOf | ENGE 2016 | - |
| dc.citation.title | ENGE 2016 | - |
| dc.citation.conferencePlace | KO | - |
| dc.citation.conferenceDate | 2016-11-06 | - |
| dc.type.rims | CONF | - |
| dc.description.journalClass | 2 | - |
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