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Surface Characterization of Multi-Layer Al2O3 / ZnO Thin Film Deposited on Transparent Polyimide Film Using Atomic Layer Deposition
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Byoung-Ho Choi | - |
| dc.date.accessioned | 2021-08-28T14:52:12Z | - |
| dc.date.available | 2021-08-28T14:52:12Z | - |
| dc.date.created | 2021-04-22 | - |
| dc.date.issued | 2016-07-25 | - |
| dc.identifier.uri | https://scholar.korea.ac.kr/handle/2021.sw.korea/28241 | - |
| dc.publisher | American Vacuum Society | - |
| dc.title | Surface Characterization of Multi-Layer Al2O3 / ZnO Thin Film Deposited on Transparent Polyimide Film Using Atomic Layer Deposition | - |
| dc.title.alternative | Surface Characterization of Multi-Layer Al2O3 / ZnO Thin Film Deposited on Transparent Polyimide Film Using Atomic Layer Deposition | - |
| dc.type | Conference | - |
| dc.contributor.affiliatedAuthor | Byoung-Ho Choi | - |
| dc.identifier.bibliographicCitation | 16th International Conference on Atomic Layer Deposition | - |
| dc.relation.isPartOf | 16th International Conference on Atomic Layer Deposition | - |
| dc.relation.isPartOf | Proceeding of the 16th International Conference on Atomic Layer Deposition | - |
| dc.citation.title | 16th International Conference on Atomic Layer Deposition | - |
| dc.citation.conferencePlace | IE | - |
| dc.citation.conferenceDate | 2016-07-24 | - |
| dc.type.rims | CONF | - |
| dc.description.journalClass | 1 | - |
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