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Data Analysis Method for Facility Breakdown Prediction in the Semiconductor Manufacturing Process
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Jun-Geol Baek | - |
| dc.date.accessioned | 2021-08-28T15:28:25Z | - |
| dc.date.available | 2021-08-28T15:28:25Z | - |
| dc.date.created | 2021-04-22 | - |
| dc.date.issued | 2016-07-04 | - |
| dc.identifier.uri | https://scholar.korea.ac.kr/handle/2021.sw.korea/28462 | - |
| dc.publisher | EURO | - |
| dc.title | Data Analysis Method for Facility Breakdown Prediction in the Semiconductor Manufacturing Process | - |
| dc.title.alternative | Data Analysis Method for Facility Breakdown Prediction in the Semiconductor Manufacturing Process | - |
| dc.type | Conference | - |
| dc.contributor.affiliatedAuthor | Jun-Geol Baek | - |
| dc.identifier.bibliographicCitation | 28th European Conference on Operational Research (EURO 2016) | - |
| dc.relation.isPartOf | 28th European Conference on Operational Research (EURO 2016) | - |
| dc.relation.isPartOf | Conference Handbook of 28th European Conference on Operational Research | - |
| dc.citation.title | 28th European Conference on Operational Research (EURO 2016) | - |
| dc.citation.conferencePlace | PL | - |
| dc.citation.conferencePlace | Poznan, Poland | - |
| dc.citation.conferenceDate | 2016-07-03 | - |
| dc.type.rims | CONF | - |
| dc.description.journalClass | 1 | - |
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