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반도체 공정의 효율적인 제어를 위한 Adaptive-MPC 알고리듬
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Jun-Geol Baek | - |
| dc.date.accessioned | 2021-08-27T08:56:09Z | - |
| dc.date.available | 2021-08-27T08:56:09Z | - |
| dc.date.created | 2021-04-22 | - |
| dc.date.issued | 2009-05-22 | - |
| dc.identifier.uri | https://scholar.korea.ac.kr/handle/2021.sw.korea/3185 | - |
| dc.publisher | 한국경영과학회/대한산업공학회 | - |
| dc.title | 반도체 공정의 효율적인 제어를 위한 Adaptive-MPC 알고리듬 | - |
| dc.type | Conference | - |
| dc.contributor.affiliatedAuthor | Jun-Geol Baek | - |
| dc.identifier.bibliographicCitation | 한국경영과학회/대한산업공학회 춘계공동학술대회 | - |
| dc.relation.isPartOf | 한국경영과학회/대한산업공학회 춘계공동학술대회 | - |
| dc.relation.isPartOf | 한국경영과학회/대한산업공학회 춘계공동학술대회 논문집 | - |
| dc.citation.title | 한국경영과학회/대한산업공학회 춘계공동학술대회 | - |
| dc.citation.conferencePlace | KO | - |
| dc.citation.conferencePlace | 부산대학교 | - |
| dc.citation.conferenceDate | 2009-05-22 | - |
| dc.type.rims | CONF | - |
| dc.description.journalClass | 2 | - |
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