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Thickness dependence of ZnO microstructure deposited on Si substrate by ALD
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | BYUN, Dong Jin | - |
| dc.date.accessioned | 2021-08-28T21:28:47Z | - |
| dc.date.available | 2021-08-28T21:28:47Z | - |
| dc.date.created | 2021-04-22 | - |
| dc.date.issued | 2015-10-27 | - |
| dc.identifier.uri | https://scholar.korea.ac.kr/handle/2021.sw.korea/32112 | - |
| dc.publisher | International Union of Materials Research Societies | - |
| dc.title | Thickness dependence of ZnO microstructure deposited on Si substrate by ALD | - |
| dc.title.alternative | Thickness dependence of ZnO microstructure deposited on Si substrate by ALD | - |
| dc.type | Conference | - |
| dc.contributor.affiliatedAuthor | BYUN, Dong Jin | - |
| dc.identifier.bibliographicCitation | 14th International Union of Materials Research Societies-International Conference on Advanced Materials | - |
| dc.relation.isPartOf | 14th International Union of Materials Research Societies-International Conference on Advanced Materials | - |
| dc.relation.isPartOf | 14th International Union of Materials Research Societies-International Conference on Advanced Materials | - |
| dc.citation.title | 14th International Union of Materials Research Societies-International Conference on Advanced Materials | - |
| dc.citation.conferencePlace | KO | - |
| dc.citation.conferenceDate | 2015-10-25 | - |
| dc.type.rims | CONF | - |
| dc.description.journalClass | 2 | - |
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