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열반응 상변화 물질을 적용한 나노리소그래피 시스템 해석
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Choi, Wonjoon | - |
| dc.date.accessioned | 2021-08-28T22:25:05Z | - |
| dc.date.available | 2021-08-28T22:25:05Z | - |
| dc.date.created | 2021-04-22 | - |
| dc.date.issued | 2015-10-15 | - |
| dc.identifier.uri | https://scholar.korea.ac.kr/handle/2021.sw.korea/32608 | - |
| dc.publisher | 한국생산제조학회 | - |
| dc.title | 열반응 상변화 물질을 적용한 나노리소그래피 시스템 해석 | - |
| dc.title.alternative | Photo-Thermal Analysis of Laser-Nanolithography using Phase Change Material | - |
| dc.type | Conference | - |
| dc.contributor.affiliatedAuthor | Choi, Wonjoon | - |
| dc.identifier.bibliographicCitation | 2015 한국생산제조시스템학회 추계학술대회 | - |
| dc.relation.isPartOf | 2015 한국생산제조시스템학회 추계학술대회 | - |
| dc.relation.isPartOf | 2015 한국생산제조시스템학회 추계학술대회 논문집 | - |
| dc.citation.title | 2015 한국생산제조시스템학회 추계학술대회 | - |
| dc.citation.conferencePlace | KO | - |
| dc.citation.conferenceDate | 2015-10-14 | - |
| dc.type.rims | CONF | - |
| dc.description.journalClass | 2 | - |
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