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Evaluation of Physical and Mechanical Properties of Al2O3 Thin Film Deposited on Transparent Polyimide Film by ALD at Low Temperature
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Byoung-Ho Choi | - |
| dc.date.accessioned | 2021-08-29T00:27:37Z | - |
| dc.date.available | 2021-08-29T00:27:37Z | - |
| dc.date.created | 2021-04-22 | - |
| dc.date.issued | 2015-06-29 | - |
| dc.identifier.uri | https://scholar.korea.ac.kr/handle/2021.sw.korea/33876 | - |
| dc.publisher | American Vacuum Society | - |
| dc.title | Evaluation of Physical and Mechanical Properties of Al2O3 Thin Film Deposited on Transparent Polyimide Film by ALD at Low Temperature | - |
| dc.title.alternative | Evaluation of Physical and Mechanical Properties of Al2O3 Thin Film Deposited on Transparent Polyimide Film by ALD at Low Temperature | - |
| dc.type | Conference | - |
| dc.contributor.affiliatedAuthor | Byoung-Ho Choi | - |
| dc.identifier.bibliographicCitation | ALD 2015 | - |
| dc.relation.isPartOf | ALD 2015 | - |
| dc.relation.isPartOf | 2015 Atomic Layer Depositon (ALD) Symposium | - |
| dc.citation.title | ALD 2015 | - |
| dc.citation.conferencePlace | US | - |
| dc.citation.conferenceDate | 2015-06-28 | - |
| dc.type.rims | CONF | - |
| dc.description.journalClass | 1 | - |
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