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Influence of temperature of AlN buffer layer deposition on crystallinity of GaNInfluence of temperature of AlN buffer layer deposition on crystallinity of GaN

Alternative Title
Influence of temperature of AlN buffer layer deposition on crystallinity of GaN
Authors
BYUN, Dong Jin
Issue Date
8-12월-2014
Publisher
한국물리학회
Citation
The 17th International Symposium on the Physics of Semiconductors and Applications
URI
https://scholar.korea.ac.kr/handle/2021.sw.korea/36434
Conference Name
The 17th International Symposium on the Physics of Semiconductors and Applications
Place
KO
Conference Date
2014-12-07
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BYUN, Dong Jin
공과대학 (신소재공학부)
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