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Characterization of ZnO Film Deposited on Silicon and Polymer Substrates by Atomic Layer Deposition at Low Process Temperatures
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Byoung-Ho Choi | - |
| dc.date.accessioned | 2021-08-29T10:36:29Z | - |
| dc.date.available | 2021-08-29T10:36:29Z | - |
| dc.date.created | 2021-04-22 | - |
| dc.date.issued | 2014-06-16 | - |
| dc.identifier.uri | https://scholar.korea.ac.kr/handle/2021.sw.korea/39968 | - |
| dc.publisher | American Vacuum Society | - |
| dc.title | Characterization of ZnO Film Deposited on Silicon and Polymer Substrates by Atomic Layer Deposition at Low Process Temperatures | - |
| dc.title.alternative | Characterization of ZnO Film Deposited on Silicon and Polymer Substrates by Atomic Layer Deposition at Low Process Temperatures | - |
| dc.type | Conference | - |
| dc.contributor.affiliatedAuthor | Byoung-Ho Choi | - |
| dc.identifier.bibliographicCitation | ALD 2014 | - |
| dc.relation.isPartOf | ALD 2014 | - |
| dc.relation.isPartOf | 2014 Atomic Layer Depositon (ALD) Symposium | - |
| dc.citation.title | ALD 2014 | - |
| dc.citation.conferencePlace | JA | - |
| dc.citation.conferenceDate | 2014-06-15 | - |
| dc.type.rims | CONF | - |
| dc.description.journalClass | 1 | - |
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Collections - College of Engineering > Department of Mechanical Engineering > 2. Conference Papers
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