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ALD 공정을 이용한 폴리카보네이트 기판의 Zinc Oxide 박막 특성분석
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Byoung-Ho Choi | - |
| dc.date.accessioned | 2021-08-29T11:40:55Z | - |
| dc.date.available | 2021-08-29T11:40:55Z | - |
| dc.date.created | 2021-04-22 | - |
| dc.date.issued | 2014-05-14 | - |
| dc.identifier.uri | https://scholar.korea.ac.kr/handle/2021.sw.korea/40635 | - |
| dc.publisher | 한국정밀공학회 | - |
| dc.title | ALD 공정을 이용한 폴리카보네이트 기판의 Zinc Oxide 박막 특성분석 | - |
| dc.title.alternative | Characterization of ZnO Film Deposited on Polycarbonate by ALD Process | - |
| dc.type | Conference | - |
| dc.contributor.affiliatedAuthor | Byoung-Ho Choi | - |
| dc.identifier.bibliographicCitation | 한국정밀공학회 2014년도 춘계학술대회 | - |
| dc.relation.isPartOf | 한국정밀공학회 2014년도 춘계학술대회 | - |
| dc.relation.isPartOf | Proceedings of KSPE 2014 Spring Conference | - |
| dc.citation.title | 한국정밀공학회 2014년도 춘계학술대회 | - |
| dc.citation.conferencePlace | KO | - |
| dc.citation.conferenceDate | 2014-05-14 | - |
| dc.type.rims | CONF | - |
| dc.description.journalClass | 2 | - |
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