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Atomic Layer Deposition (ALD) for Surface and Interface Engineering
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Shim, Joon Hyung | - |
| dc.date.accessioned | 2021-08-29T12:02:20Z | - |
| dc.date.available | 2021-08-29T12:02:20Z | - |
| dc.date.created | 2021-04-22 | - |
| dc.date.issued | 2014-04-25 | - |
| dc.identifier.uri | https://scholar.korea.ac.kr/handle/2021.sw.korea/40929 | - |
| dc.publisher | 대한기계학회 | - |
| dc.title | Atomic Layer Deposition (ALD) for Surface and Interface Engineering | - |
| dc.title.alternative | Atomic Layer Deposition (ALD) for Surface and Interface Engineering | - |
| dc.type | Conference | - |
| dc.contributor.affiliatedAuthor | Shim, Joon Hyung | - |
| dc.identifier.bibliographicCitation | 2014년도 대한기계학회 열공학부문 춘계학술대회 | - |
| dc.relation.isPartOf | 2014년도 대한기계학회 열공학부문 춘계학술대회 | - |
| dc.relation.isPartOf | N/A | - |
| dc.citation.title | 2014년도 대한기계학회 열공학부문 춘계학술대회 | - |
| dc.citation.conferencePlace | KO | - |
| dc.citation.conferenceDate | 2014-04-23 | - |
| dc.type.rims | CONF | - |
| dc.description.journalClass | 2 | - |
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Collections - College of Engineering > Department of Mechanical Engineering > 2. Conference Papers
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