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A Spatial Point Pattern Analysis to Recognize Fail Bit Patterns in Semiconductor Manufacturing
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Jun-Geol Baek | - |
| dc.date.accessioned | 2021-08-29T13:49:25Z | - |
| dc.date.available | 2021-08-29T13:49:25Z | - |
| dc.date.created | 2021-04-22 | - |
| dc.date.issued | 2014-02-17 | - |
| dc.identifier.uri | https://scholar.korea.ac.kr/handle/2021.sw.korea/41918 | - |
| dc.publisher | World Academy of Science, Engineering and Technology | - |
| dc.title | A Spatial Point Pattern Analysis to Recognize Fail Bit Patterns in Semiconductor Manufacturing | - |
| dc.type | Conference | - |
| dc.contributor.affiliatedAuthor | Jun-Geol Baek | - |
| dc.identifier.bibliographicCitation | International Conference on Manufacturing Systems Engineering and Management (ICMSEM 2014) | - |
| dc.relation.isPartOf | International Conference on Manufacturing Systems Engineering and Management (ICMSEM 2014) | - |
| dc.relation.isPartOf | ICMSEM 2014 | - |
| dc.citation.title | International Conference on Manufacturing Systems Engineering and Management (ICMSEM 2014) | - |
| dc.citation.conferencePlace | TU | - |
| dc.citation.conferencePlace | Istanbul, Turkey | - |
| dc.citation.conferenceDate | 2014-02-17 | - |
| dc.type.rims | CONF | - |
| dc.description.journalClass | 1 | - |
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