Kim, Jongseok; Kwon, Sangwook; Hong, Youngtack; Song, Insang; Jeong, Heemoon; Choi, Hyung; Ju, Byeongkwon
ArticleIssue Date2009CitationJOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS, v.8, no.4PublisherSPIE-SOC PHOTO-OPTICAL INSTRUMENTATION ENGINEERS