한국어
LIBRARY
Researchers
Titles
Issue Date
검색
Search
All of ScholarWorks
College of Engineering
School of Electrical Engineering
1. Journal Articles
Current filters:
Title
Author
Subject
Date Issued
Type
Language
Journal
Journal Index
Equals
Contains
ID
Not Equals
Not Contains
Not ID
Current filters:
Title
Author
Subject
Date Issued
Type
Language
Journal
Journal Index
Equals
Contains
ID
Not Equals
Not Contains
Not ID
Current filters:
Title
Author
Subject
Date Issued
Type
Language
Journal
Journal Index
Equals
Contains
ID
Not Equals
Not Contains
Not ID
Current filters:
Title
Author
Subject
Date Issued
Type
Language
Journal
Journal Index
Equals
Contains
ID
Not Equals
Not Contains
Not ID
Current filters:
Title
Author
Subject
Date Issued
Type
Language
Journal
Journal Index
Equals
Contains
ID
Not Equals
Not Contains
Not ID
Add filters:
Title
Author
Subject
Date Issued
Type
Language
Journal
Journal Index
Equals
Contains
ID
Not Equals
Not Contains
Not ID
Results/Page
5
10
15
20
25
30
35
40
45
50
55
60
65
70
75
80
85
90
95
100
Sort items by
Relevance
Title
Issue Date
In order
Ascending
Descending
Authors/record
All
1
5
10
15
20
25
30
35
40
45
50
Results 1-1 of 1 (Search time: 0.004 seconds).
SCIE
SCOPUS
Environmental ozone effect on the growth of hemispherical grained silicon for ULSI DRAM stacked capacitor
Park, YK; Kim, HJ; Kim, DW; Park, JH
Article
Issue Date
2001
Citation
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, v.148, no.8, pp.F170 - F174
Publisher
ELECTROCHEMICAL SOC INC
1
Discover
Author
Kim, DW
1
Kim, HJ
1
Park, JH
1
Park, YK
1
Subject
hemisphercal granined Silicon
1
ozone effect
1
REMOVAL
1
ULSI DRAM stacked capacitor
1
Type
Article
1
Language
English
1
Journal Index
scie
1
BROWSE
한국어
Researchers
Titles
Issue Date
LIBRARY