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Investigation of the layout and optical proximity correction effects to control the trench etching process on 4H-SiC
Kyoung, Sinsu; Jung, Eun-Sik; Sung, Man Young
Article
Issue Date
2017
Citation
ELECTRONIC MATERIALS LETTERS, v.13, no.4, pp.368 - 372
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KOREAN INST METALS MATERIALS
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Jung, Eun-Sik
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Kyoung, Sinsu
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Sung, Man Young
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4H-SiC trench etching
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area effect
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loading effect
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OPC
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RIE lagging
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SILICON
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2017
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