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SCOPUS
An intelligent virtual metrology system with adaptive update for semiconductor manufacturing
Kang, Seokho;
Kang, Pilsung
Article
Issue Date
2017
Citation
JOURNAL OF PROCESS CONTROL, v.52, pp.66 - 74
Publisher
ELSEVIER SCI LTD
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Kang, Seokho
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Reliability estimation
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Semiconductor manufacturing
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Virtual metrology
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English
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Journal of Process Control
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