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SCIE
SCOPUS
A Hierarchical Spatial-Test Attention Network for Explainable Multiple Wafer Bin Maps Classification
Do, Hyungrok; Lee, Changhyun;
Kim, Seoung Bum
Article
Issue Date
2022
Citation
IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, v.35, no.1, pp.78 - 86
Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
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Author
Do, Hyungrok
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Lee, Changhyun
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KIM, Seoung Bum
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attention mechanism
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AUTOMATIC IDENTIFICATION
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Context modeling
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Convolutional neural networks
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explainable neural network
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Feature extraction
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Machine learning
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Manufacturing
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Multiple wafer bin maps classific...
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