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SCOPUS
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A Clustering-Based Equipment Condition Model of Chemical Vapor Deposition Process
Yoo, Youngji; Park, Seung Hwan;
Baek, Jun-Geol
Article
Issue Date
2019
Citation
INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING, v.20, no.10, pp.1677 - 1689
Publisher
KOREAN SOC PRECISION ENG
1
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Author
Baek, Jun Geol
1
Park, Seung Hwan
1
Yoo, Youngji
1
Subject
Chemical vapor deposition (CVD) p...
1
CONDITION-BASED MAINTENANCE
1
DIAGNOSIS
1
Health condition monitoring
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Predictive maintenance
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Semiconductor manufacturing process
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2019
1
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English
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International Journal of Precisio...
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