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SCIE
SCOPUS
STRUCTURED REGULARIZATION MODELING FOR VIRTUAL METROLOGY IN SEMICONDUCTOR MANUFACTURING PROCESSES
Park, Chanhee; Park, Sung Ho;
Kim, Seoung Bum
Article
Issue Date
2019
Citation
INTERNATIONAL JOURNAL OF INDUSTRIAL ENGINEERING-THEORY APPLICATIONS AND PRACTICE, v.26, no.6, pp.835 - 849
Publisher
UNIV CINCINNATI INDUSTRIAL ENGINEERING
1
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Author
Park, Chanhee
1
Park, Sung Ho
1
KIM, Seoung Bum
1
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DESIGN
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feature selection
1
IDENTIFICATION
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machine learning
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process control
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SHRINKAGE
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sparse regularization
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VARIABLE SELECTION
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virtual metrology
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Article
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English
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International Journal of Industri...
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scie
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