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Printed silicon broadband membrane reflectors by laser interference lithographyPrinted silicon broadband membrane reflectors by laser interference lithography

Alternative Title
Printed silicon broadband membrane reflectors by laser interference lithography
Authors
Ju, Byeongkwon
Issue Date
14-10월-2013
Publisher
IEEE Electron Devices Society
Citation
2013 International Semiconductor Conference
URI
https://scholar.korea.ac.kr/handle/2021.sw.korea/43155
Conference Name
2013 International Semiconductor Conference
Conference Date
2013-10-14
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공과대학 (전기전자공학부)
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