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TiO2 thin film in an inductively coupled Ar/Cl2/HBr plasma using neural network modeling
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | PARK KANG-BAK | - |
| dc.date.accessioned | 2021-08-29T16:34:03Z | - |
| dc.date.available | 2021-08-29T16:34:03Z | - |
| dc.date.created | 2021-04-22 | - |
| dc.date.issued | 2013-08-28 | - |
| dc.identifier.uri | https://scholar.korea.ac.kr/handle/2021.sw.korea/43617 | - |
| dc.publisher | AJC-APSE | - |
| dc.title | TiO2 thin film in an inductively coupled Ar/Cl2/HBr plasma using neural network modeling | - |
| dc.title.alternative | TiO2 thin film in an inductively coupled Ar/Cl2/HBr plasma using neural network modeling | - |
| dc.type | Conference | - |
| dc.contributor.affiliatedAuthor | PARK KANG-BAK | - |
| dc.identifier.bibliographicCitation | AEPSE 2013 | - |
| dc.relation.isPartOf | AEPSE 2013 | - |
| dc.relation.isPartOf | AEPSE 2013 abstract | - |
| dc.citation.title | AEPSE 2013 | - |
| dc.citation.conferencePlace | KO | - |
| dc.citation.conferencePlace | Korea(Jeju) | - |
| dc.citation.conferenceDate | 2013-08-25 | - |
| dc.type.rims | CONF | - |
| dc.description.journalClass | 1 | - |
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