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Characteristics of Deposition RF-Power by sputter of Silicon Anode Electrode for Thin Film Battery

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dc.contributor.authorBYUN, Dong Jin-
dc.date.accessioned2021-08-27T09:55:44Z-
dc.date.available2021-08-27T09:55:44Z-
dc.date.created2021-04-22-
dc.date.issued2020-11-19-
dc.identifier.urihttps://scholar.korea.ac.kr/handle/2021.sw.korea/4427-
dc.publisher한국재료학회-
dc.titleCharacteristics of Deposition RF-Power by sputter of Silicon Anode Electrode for Thin Film Battery-
dc.title.alternativeCharacteristics of Deposition RF-Power by sputter of Silicon Anode Electrode for Thin Film Battery-
dc.typeConference-
dc.contributor.affiliatedAuthorBYUN, Dong Jin-
dc.identifier.bibliographicCitation2020년도 한국재료학회 춘.추계학술대회-
dc.relation.isPartOf2020년도 한국재료학회 춘.추계학술대회-
dc.relation.isPartOf2020년도 한국재료학회 춘.추계학술대회-
dc.citation.title2020년도 한국재료학회 춘.추계학술대회-
dc.citation.conferencePlaceKO-
dc.citation.conferenceDate2020-11-18-
dc.type.rimsCONF-
dc.description.journalClass2-
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