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Effect of inductively coupled plasma on the properties of ITO source/drain electrode for ZnO-based thin-film transistorsEffect of inductively coupled plasma on the properties of ITO source/drain electrode for ZnO-based thin-film transistors

Alternative Title
Effect of inductively coupled plasma on the properties of ITO source/drain electrode for ZnO-based thin-film transistors
Authors
Ju, Byeongkwon
Issue Date
1-4월-2013
Publisher
Materials Research Society
Citation
MRS 2013
URI
https://scholar.korea.ac.kr/handle/2021.sw.korea/44732
Conference Name
MRS 2013
Place
US
Conference Date
2013-04-01
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College of Engineering > School of Electrical Engineering > 2. Conference Papers

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Ju, Byeong kwon
공과대학 (전기전자공학부)
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