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Development of 4 Degree-of-Freedom ultra-precision Stage with millimeter motion range
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Jaehwa Jeong | - |
| dc.date.accessioned | 2021-08-29T19:34:01Z | - |
| dc.date.available | 2021-08-29T19:34:01Z | - |
| dc.date.created | 2021-04-22 | - |
| dc.date.issued | 2012-10-18 | - |
| dc.identifier.uri | https://scholar.korea.ac.kr/handle/2021.sw.korea/45391 | - |
| dc.publisher | Institute of Control, Robotics and Systems | - |
| dc.title | Development of 4 Degree-of-Freedom ultra-precision Stage with millimeter motion range | - |
| dc.title.alternative | Development of 4 Degree-of-Freedom ultra-precision Stage with millimeter motion range | - |
| dc.type | Conference | - |
| dc.contributor.affiliatedAuthor | Jaehwa Jeong | - |
| dc.identifier.bibliographicCitation | 2012 12th International Conference on Control, Automation and Systems, pp.1061 - 1064 | - |
| dc.relation.isPartOf | 2012 12th International Conference on Control, Automation and Systems | - |
| dc.relation.isPartOf | Proceedings of the 12th International Conference on Control, Automation and Systems | - |
| dc.citation.title | 2012 12th International Conference on Control, Automation and Systems | - |
| dc.citation.startPage | 1061 | - |
| dc.citation.endPage | 1064 | - |
| dc.citation.conferencePlace | KO | - |
| dc.citation.conferenceDate | 2012-10-17 | - |
| dc.type.rims | CONF | - |
| dc.description.journalClass | 1 | - |
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