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Design of nano-device using highly stable insulator film
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | PARK, JUNG HO | - |
| dc.date.accessioned | 2021-08-29T20:43:16Z | - |
| dc.date.available | 2021-08-29T20:43:16Z | - |
| dc.date.created | 2021-04-22 | - |
| dc.date.issued | 2012-04-06 | - |
| dc.identifier.uri | https://scholar.korea.ac.kr/handle/2021.sw.korea/46054 | - |
| dc.publisher | 마이크로나노시스템학회 | - |
| dc.title | Design of nano-device using highly stable insulator film | - |
| dc.title.alternative | Design of nano-device using highly stable insulator film | - |
| dc.type | Conference | - |
| dc.contributor.affiliatedAuthor | PARK, JUNG HO | - |
| dc.identifier.bibliographicCitation | Proceedings of the 14th Korean MEMS Conference | - |
| dc.relation.isPartOf | Proceedings of the 14th Korean MEMS Conference | - |
| dc.relation.isPartOf | Proceedings of the 14th Korean MEMS Conference | - |
| dc.citation.title | Proceedings of the 14th Korean MEMS Conference | - |
| dc.citation.conferencePlace | KO | - |
| dc.citation.conferenceDate | 2012-04-05 | - |
| dc.type.rims | CONF | - |
| dc.description.journalClass | 2 | - |
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