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2-step ELOG of GaN on C-plane Sapphire using Carbonized PR Mask2-step ELOG of GaN on C-plane Sapphire using Carbonized PR Mask
- Alternative Title
- 2-step ELOG of GaN on C-plane Sapphire using Carbonized PR Mask
- Authors
- BYUN, Dong Jin
- Issue Date
- 16-2월-2012
- Publisher
- 한국물리학회 반도체분과회, 한국재료학회
- Citation
- 제19회 한국반도체학술대회
- Conference Name
- 제19회 한국반도체학술대회
- Place
- KO
- Conference Date
- 2012-02-15
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