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Dynamic Deadband Control in Semiconductor Manufacturing
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Jun-Geol Baek | - |
| dc.date.accessioned | 2021-08-29T23:43:12Z | - |
| dc.date.available | 2021-08-29T23:43:12Z | - |
| dc.date.created | 2021-04-22 | - |
| dc.date.issued | 2009-11-19 | - |
| dc.identifier.uri | https://scholar.korea.ac.kr/handle/2021.sw.korea/47853 | - |
| dc.publisher | IEEE | - |
| dc.title | Dynamic Deadband Control in Semiconductor Manufacturing | - |
| dc.type | Conference | - |
| dc.contributor.affiliatedAuthor | Jun-Geol Baek | - |
| dc.identifier.bibliographicCitation | 2009 IEEE International Symposium on Assembly and Manufacturing, pp.412 - 416 | - |
| dc.relation.isPartOf | 2009 IEEE International Symposium on Assembly and Manufacturing | - |
| dc.relation.isPartOf | Proceedings of 2009 IEEE International Symposium on Assembly and Manufacturing | - |
| dc.citation.title | 2009 IEEE International Symposium on Assembly and Manufacturing | - |
| dc.citation.startPage | 412 | - |
| dc.citation.endPage | 416 | - |
| dc.citation.conferencePlace | KO | - |
| dc.citation.conferencePlace | Suwon, Korea | - |
| dc.citation.conferenceDate | 2009-11-17 | - |
| dc.type.rims | CONF | - |
| dc.description.journalClass | 1 | - |
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