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A Study of the CMP(Chemical Mechanical Process) Simulation using FEM(Finite Element Method) and the Run-to-Run Control Algorithm
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Jun-Geol Baek | - |
| dc.date.accessioned | 2021-08-29T23:52:36Z | - |
| dc.date.available | 2021-08-29T23:52:36Z | - |
| dc.date.created | 2021-04-22 | - |
| dc.date.issued | 2009-11-09 | - |
| dc.identifier.uri | https://scholar.korea.ac.kr/handle/2021.sw.korea/48054 | - |
| dc.publisher | ISMI | - |
| dc.title | A Study of the CMP(Chemical Mechanical Process) Simulation using FEM(Finite Element Method) and the Run-to-Run Control Algorithm | - |
| dc.type | Conference | - |
| dc.contributor.affiliatedAuthor | Jun-Geol Baek | - |
| dc.identifier.bibliographicCitation | AEC/APC Symposium Asia 2009 | - |
| dc.relation.isPartOf | AEC/APC Symposium Asia 2009 | - |
| dc.relation.isPartOf | AEC/APC Symposium Asia 2009 | - |
| dc.citation.title | AEC/APC Symposium Asia 2009 | - |
| dc.citation.conferencePlace | JA | - |
| dc.citation.conferencePlace | National Center of Sciences Building, Tokyo, Japan | - |
| dc.citation.conferenceDate | 2009-11-09 | - |
| dc.type.rims | CONF | - |
| dc.description.journalClass | 1 | - |
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