Study of adaptive model predictive control algorithm for efficient control of semiconductor process
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Jun-Geol Baek | - |
dc.date.accessioned | 2021-08-29T23:52:39Z | - |
dc.date.available | 2021-08-29T23:52:39Z | - |
dc.date.created | 2021-04-22 | - |
dc.date.issued | 2009-11-09 | - |
dc.identifier.uri | https://scholar.korea.ac.kr/handle/2021.sw.korea/48055 | - |
dc.publisher | ISMI | - |
dc.title | Study of adaptive model predictive control algorithm for efficient control of semiconductor process | - |
dc.type | Conference | - |
dc.contributor.affiliatedAuthor | Jun-Geol Baek | - |
dc.identifier.bibliographicCitation | AEC/APC Symposium Asia 2009 | - |
dc.relation.isPartOf | AEC/APC Symposium Asia 2009 | - |
dc.relation.isPartOf | AEC/APC Symposium Asia 2009 | - |
dc.citation.title | AEC/APC Symposium Asia 2009 | - |
dc.citation.conferencePlace | JA | - |
dc.citation.conferencePlace | National Center of Sciences Building, Tokyo, Japan | - |
dc.citation.conferenceDate | 2009-11-09 | - |
dc.type.rims | CONF | - |
dc.description.journalClass | 1 | - |
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.
(02841) 서울특별시 성북구 안암로 14502-3290-1114
COPYRIGHT © 2021 Korea University. All Rights Reserved.
Certain data included herein are derived from the © Web of Science of Clarivate Analytics. All rights reserved.
You may not copy or re-distribute this material in whole or in part without the prior written consent of Clarivate Analytics.