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Effect of Oxygen Ambient on Intrinsic Stress of ZnO Thin Films and Physical Properties for The Channel Layer of Transparent TFTs
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Moon Byung-Moo | - |
| dc.date.accessioned | 2021-08-30T08:55:38Z | - |
| dc.date.available | 2021-08-30T08:55:38Z | - |
| dc.date.created | 2021-04-22 | - |
| dc.date.issued | 2009-02-20 | - |
| dc.identifier.uri | https://scholar.korea.ac.kr/handle/2021.sw.korea/51722 | - |
| dc.publisher | 삼성전자(주)/한국반도체산업협회/한국반도체연구조합 | - |
| dc.title | Effect of Oxygen Ambient on Intrinsic Stress of ZnO Thin Films and Physical Properties for The Channel Layer of Transparent TFTs | - |
| dc.type | Conference | - |
| dc.contributor.affiliatedAuthor | Moon Byung-Moo | - |
| dc.identifier.bibliographicCitation | 제16회 한국반도체학술대회 | - |
| dc.relation.isPartOf | 제16회 한국반도체학술대회 | - |
| dc.relation.isPartOf | 제16회 한국반도체학술대회 | - |
| dc.citation.title | 제16회 한국반도체학술대회 | - |
| dc.citation.conferencePlace | KO | - |
| dc.citation.conferencePlace | 대전컴벤션센터(DCC) | - |
| dc.citation.conferenceDate | 2009-02-18 | - |
| dc.type.rims | CONF | - |
| dc.description.journalClass | 2 | - |
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