Textured Pb(Zr,Ti)O-3-Pb[(Zn,Ni)(1/3)Nb-2/3]O-3 multilayer ceramics and their application to piezoelectric actuators
- Authors
- Kim, Eun-Ji; Lee, Tae-Gon; Kim, Dae Su; Kim, Sun-Woo; Yee, Yeon-Jeong; Han, Seung Ho; Kang, Hyung-Won; Nahm, Sahn
- Issue Date
- 9월-2020
- Publisher
- ELSEVIER
- Keywords
- Textured piezoelectric ceramic; Low temperature sintering; Multilayer; Actuator; Strain equation
- Citation
- APPLIED MATERIALS TODAY, v.20
- Indexed
- SCIE
SCOPUS
- Journal Title
- APPLIED MATERIALS TODAY
- Volume
- 20
- URI
- https://scholar.korea.ac.kr/handle/2021.sw.korea/53218
- DOI
- 10.1016/j.apmt.2020.100695
- ISSN
- 2352-9407
- Abstract
- 0.69Pb(Zr0.47Ti0.53)-0.31Pb[(Zn0.4Ni0.6)(1/3)Nb-2/3]O-3 (PZT-PZNN) thick films were textured at 950 degrees C along the [001] direction using BaTiO3 (BT) platelets. The 80Ag/20Pd electrodes coated on the PZT-PZNN thick films considerably assisted the texturing of the thick film. PZT-PZNN thick films with 5 vol% BT seeds exhibited a large strain (0.33% at 4.0 kV/mm) and d(33)* (1,040 pm/V at 1.5 kV/mm). Because the variations in d(33)* and strain of the PZT-PZNN thick films were not explained by Rayleigh's law, the experimental formula, which fits the measured d(33)* and strain, was suggested. Multilayer ceramics (MLCs) comprising five layers of textured PZT-PZNN thick films were fabricated at 950 degrees C. Cantilever-type actuators produced by textured PZT-PZNN MLCs exhibited a large acceleration (46.9 G) and displacement (10.5 mm) at 50 V, which were much larger than those (32.6 G and 7 mm) of the actuators produced by untextured MLCs. Therefore, textured piezoelectric thick film can considerably improve the actuating properties of piezoelectric actuators. (c) 2020 Elsevier Ltd. All rights reserved.
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