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A Novel Route to Nanostructured Patterns via Inductively Coupled Plasma Etching of Block Copolymer Templates on GaN layer

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dc.contributor.authorBang, Joona-
dc.date.accessioned2021-08-31T05:27:13Z-
dc.date.available2021-08-31T05:27:13Z-
dc.date.created2021-04-22-
dc.date.issued2008-06-25-
dc.identifier.urihttps://scholar.korea.ac.kr/handle/2021.sw.korea/56913-
dc.publisherTMS Meeting Services-
dc.titleA Novel Route to Nanostructured Patterns via Inductively Coupled Plasma Etching of Block Copolymer Templates on GaN layer-
dc.typeConference-
dc.contributor.affiliatedAuthorBang, Joona-
dc.identifier.bibliographicCitation2008 Electronic Materials Conference-
dc.relation.isPartOf2008 Electronic Materials Conference-
dc.relation.isPartOfThe Premier Annual Forum on the Preparation and Characterization of Electronic Materialsfor 50 Years-
dc.citation.title2008 Electronic Materials Conference-
dc.citation.conferencePlaceUS-
dc.citation.conferencePlaceUniversity of California, Santa Barbara-
dc.citation.conferenceDate2008-06-25-
dc.type.rimsCONF-
dc.description.journalClass1-
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