A Novel Route to Nanostructured Patterns via Inductively Coupled Plasma Etching of Block Copolymer Templates on GaN layer
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Bang, Joona | - |
dc.date.accessioned | 2021-08-31T05:27:13Z | - |
dc.date.available | 2021-08-31T05:27:13Z | - |
dc.date.created | 2021-04-22 | - |
dc.date.issued | 2008-06-25 | - |
dc.identifier.uri | https://scholar.korea.ac.kr/handle/2021.sw.korea/56913 | - |
dc.publisher | TMS Meeting Services | - |
dc.title | A Novel Route to Nanostructured Patterns via Inductively Coupled Plasma Etching of Block Copolymer Templates on GaN layer | - |
dc.type | Conference | - |
dc.contributor.affiliatedAuthor | Bang, Joona | - |
dc.identifier.bibliographicCitation | 2008 Electronic Materials Conference | - |
dc.relation.isPartOf | 2008 Electronic Materials Conference | - |
dc.relation.isPartOf | The Premier Annual Forum on the Preparation and Characterization of Electronic Materialsfor 50 Years | - |
dc.citation.title | 2008 Electronic Materials Conference | - |
dc.citation.conferencePlace | US | - |
dc.citation.conferencePlace | University of California, Santa Barbara | - |
dc.citation.conferenceDate | 2008-06-25 | - |
dc.type.rims | CONF | - |
dc.description.journalClass | 1 | - |
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