Improved Light Extraction Efficiency of GaN Based Blue Light Emitting Diode Using Nano-Scaled Patterned Sapphire Substrate
- Authors
- Sung, Young Hoon; Park, Jaemin; Choi, Eun-Seo; Lee, Hee Chul; Lee, Heon
- Issue Date
- 12월-2019
- Publisher
- AMER SCIENTIFIC PUBLISHERS
- Keywords
- LED (Light Emitting Diode); Nanoimprint; NPSS (Nano-Patterned Sapphire Substrate); Sapphire Etching
- Citation
- JOURNAL OF NANOELECTRONICS AND OPTOELECTRONICS, v.14, no.12, pp.1655 - 1659
- Indexed
- SCIE
- Journal Title
- JOURNAL OF NANOELECTRONICS AND OPTOELECTRONICS
- Volume
- 14
- Number
- 12
- Start Page
- 1655
- End Page
- 1659
- URI
- https://scholar.korea.ac.kr/handle/2021.sw.korea/61419
- DOI
- 10.1166/jno.2019.2669
- ISSN
- 1555-130X
- Abstract
- In this study, two different conical-shape nano-patterns were fabricated on the 2-inch diameter sapphire wafer in order to improve the efficiency of light-emitting diodes. The conical-shape nano-patterns were fabricated on the sapphire wafer using a nanoimprint technique and dry etching method. A blue LED structure was grown on the nanoscale-patterned sapphire substrates. The photoluminescence and electroluminescence were measured to confirm the effectiveness of the nano-scale patterns. An improvement in the luminescence efficiency was observed in case that nano-patterned sapphire substrate was used; a 1.44 times-higher photoluminescence intensity and a 1.5 times-higher electroluminescence intensity were observed, compared to those of the light-emitting diodes structure grown on a conventional flat sapphire wafer.
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