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Fabrication of patterned phase change pillars by laser interference lithography
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Ju, Byeongkwon | - |
| dc.date.accessioned | 2021-09-01T08:10:49Z | - |
| dc.date.available | 2021-09-01T08:10:49Z | - |
| dc.date.created | 2021-04-22 | - |
| dc.identifier.uri | https://scholar.korea.ac.kr/handle/2021.sw.korea/63389 | - |
| dc.publisher | 한국진공학회 | - |
| dc.title | Fabrication of patterned phase change pillars by laser interference lithography | - |
| dc.type | Conference | - |
| dc.contributor.affiliatedAuthor | Ju, Byeongkwon | - |
| dc.identifier.bibliographicCitation | ICMAP 2009 | - |
| dc.relation.isPartOf | ICMAP 2009 | - |
| dc.citation.title | ICMAP 2009 | - |
| dc.citation.conferenceDate | 2009-09-22 | - |
| dc.type.rims | CONF | - |
| dc.description.journalClass | 2 | - |
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