High sensitivity Capacitive Humidity Sensor with a Novel Polyimide Design Fabricated by MEMS Technology
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Moon Byung-Moo | - |
dc.date.accessioned | 2021-09-01T13:14:52Z | - |
dc.date.available | 2021-09-01T13:14:52Z | - |
dc.date.created | 2021-04-22 | - |
dc.identifier.uri | https://scholar.korea.ac.kr/handle/2021.sw.korea/64544 | - |
dc.publisher | 4th IEEE-NEMS | - |
dc.title | High sensitivity Capacitive Humidity Sensor with a Novel Polyimide Design Fabricated by MEMS Technology | - |
dc.type | Conference | - |
dc.contributor.affiliatedAuthor | Moon Byung-Moo | - |
dc.identifier.bibliographicCitation | 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems | - |
dc.relation.isPartOf | 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems | - |
dc.citation.title | 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems | - |
dc.citation.conferencePlace | CC | - |
dc.citation.conferenceDate | 2009-01-05 | - |
dc.type.rims | CONF | - |
dc.description.journalClass | 1 | - |
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