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High sensitivity Capacitive Humidity Sensor with a Novel Polyimide Design Fabricated by MEMS Technology

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dc.contributor.authorMoon Byung-Moo-
dc.date.accessioned2021-09-01T13:14:52Z-
dc.date.available2021-09-01T13:14:52Z-
dc.date.created2021-04-22-
dc.identifier.urihttps://scholar.korea.ac.kr/handle/2021.sw.korea/64544-
dc.publisher4th IEEE-NEMS-
dc.titleHigh sensitivity Capacitive Humidity Sensor with a Novel Polyimide Design Fabricated by MEMS Technology-
dc.typeConference-
dc.contributor.affiliatedAuthorMoon Byung-Moo-
dc.identifier.bibliographicCitation4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems-
dc.relation.isPartOf4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems-
dc.citation.title4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems-
dc.citation.conferencePlaceCC-
dc.citation.conferenceDate2009-01-05-
dc.type.rimsCONF-
dc.description.journalClass1-
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