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사파이어 기판에 sub-micron급 패터닝을 위한 나노 임프린트 리소그래피 공정
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Lee, Heon | - |
| dc.date.accessioned | 2021-09-01T14:15:31Z | - |
| dc.date.available | 2021-09-01T14:15:31Z | - |
| dc.date.created | 2021-04-22 | - |
| dc.identifier.uri | https://scholar.korea.ac.kr/handle/2021.sw.korea/65037 | - |
| dc.publisher | 한국재료학회 | - |
| dc.title | 사파이어 기판에 sub-micron급 패터닝을 위한 나노 임프린트 리소그래피 공정 | - |
| dc.type | Conference | - |
| dc.contributor.affiliatedAuthor | Lee, Heon | - |
| dc.identifier.bibliographicCitation | 2009 춘계 재료 학회 | - |
| dc.relation.isPartOf | 2009 춘계 재료 학회 | - |
| dc.citation.title | 2009 춘계 재료 학회 | - |
| dc.citation.conferencePlace | KO | - |
| dc.citation.conferenceDate | 2009-05-21 | - |
| dc.type.rims | CONF | - |
| dc.description.journalClass | 2 | - |
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