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실리콘 산화막의 두께에 따른 ALD Al2O3 박막의 passivation 효과
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | KIM, Donghwan | - |
| dc.date.accessioned | 2021-09-01T15:15:56Z | - |
| dc.date.available | 2021-09-01T15:15:56Z | - |
| dc.date.created | 2021-04-22 | - |
| dc.identifier.uri | https://scholar.korea.ac.kr/handle/2021.sw.korea/65521 | - |
| dc.publisher | 한국신재생에너지학회 | - |
| dc.title | 실리콘 산화막의 두께에 따른 ALD Al2O3 박막의 passivation 효과 | - |
| dc.type | Conference | - |
| dc.contributor.affiliatedAuthor | KIM, Donghwan | - |
| dc.identifier.bibliographicCitation | 2009 한국신재생에너지학회 춘계학술대회 | - |
| dc.relation.isPartOf | 2009 한국신재생에너지학회 춘계학술대회 | - |
| dc.citation.title | 2009 한국신재생에너지학회 춘계학술대회 | - |
| dc.citation.conferencePlace | KO | - |
| dc.citation.conferencePlace | 제주 | - |
| dc.citation.conferenceDate | 2009-06-25 | - |
| dc.type.rims | CONF | - |
| dc.description.journalClass | 2 | - |
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