Detailed Information
Cited 0 time in 
Cited 0 time in 
Cited 0 time in
Metadata Downloads
FABRICATION OF SUB-MICRON SIZED SAPPHIRE PATTERNS BY USING NANOIMPRINT LITHOGRAPHY AND INDUCTIVELY-COUPLED PLASMA ETCHING
Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Lee, Heon | - |
| dc.date.accessioned | 2021-09-01T16:33:13Z | - |
| dc.date.available | 2021-09-01T16:33:13Z | - |
| dc.date.created | 2021-04-22 | - |
| dc.identifier.uri | https://scholar.korea.ac.kr/handle/2021.sw.korea/66208 | - |
| dc.publisher | LED 반도체 조명 학회 | - |
| dc.title | FABRICATION OF SUB-MICRON SIZED SAPPHIRE PATTERNS BY USING NANOIMPRINT LITHOGRAPHY AND INDUCTIVELY-COUPLED PLASMA ETCHING | - |
| dc.type | Conference | - |
| dc.contributor.affiliatedAuthor | Lee, Heon | - |
| dc.identifier.bibliographicCitation | ICNS-8 | - |
| dc.relation.isPartOf | ICNS-8 | - |
| dc.citation.title | ICNS-8 | - |
| dc.citation.conferencePlace | KO | - |
| dc.citation.conferenceDate | 2009-10-18 | - |
| dc.type.rims | CONF | - |
| dc.description.journalClass | 1 | - |
- Files in This Item
- There are no files associated with this item.
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.