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New Anomaly Detection in Semiconductor Manufacturing Process using Oversampling Method
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Jun-Geol Baek | - |
| dc.date.accessioned | 2021-08-27T11:57:13Z | - |
| dc.date.available | 2021-08-27T11:57:13Z | - |
| dc.date.created | 2021-04-22 | - |
| dc.date.issued | 2020-02-23 | - |
| dc.identifier.uri | https://scholar.korea.ac.kr/handle/2021.sw.korea/6790 | - |
| dc.publisher | INSTICC | - |
| dc.title | New Anomaly Detection in Semiconductor Manufacturing Process using Oversampling Method | - |
| dc.title.alternative | New Anomaly Detection in Semiconductor Manufacturing Process using Oversampling Method | - |
| dc.type | Conference | - |
| dc.contributor.affiliatedAuthor | Jun-Geol Baek | - |
| dc.identifier.bibliographicCitation | 12th International Conference on Agents and Artificial Intelligence (ICAART 2020) | - |
| dc.relation.isPartOf | 12th International Conference on Agents and Artificial Intelligence (ICAART 2020) | - |
| dc.relation.isPartOf | Proceedings of ICAART 2020 | - |
| dc.citation.title | 12th International Conference on Agents and Artificial Intelligence (ICAART 2020) | - |
| dc.citation.conferencePlace | MM | - |
| dc.citation.conferencePlace | Valletta, Malta | - |
| dc.citation.conferenceDate | 2020-02-22 | - |
| dc.type.rims | CONF | - |
| dc.description.journalClass | 1 | - |
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