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Zr-doped TiO2 Thin Films on RuO2 Substrate Grown by Atomic Layer Deposition
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Ha, Jeong Sook | - |
| dc.date.accessioned | 2021-09-02T06:56:31Z | - |
| dc.date.available | 2021-09-02T06:56:31Z | - |
| dc.date.created | 2021-04-22 | - |
| dc.identifier.uri | https://scholar.korea.ac.kr/handle/2021.sw.korea/73322 | - |
| dc.publisher | Materials Research Society | - |
| dc.title | Zr-doped TiO2 Thin Films on RuO2 Substrate Grown by Atomic Layer Deposition | - |
| dc.type | Conference | - |
| dc.contributor.affiliatedAuthor | Ha, Jeong Sook | - |
| dc.identifier.bibliographicCitation | 2008 MRS Spring Meeting | - |
| dc.relation.isPartOf | 2008 MRS Spring Meeting | - |
| dc.citation.title | 2008 MRS Spring Meeting | - |
| dc.citation.conferencePlace | US | - |
| dc.citation.conferenceDate | 2008-03-24 | - |
| dc.type.rims | CONF | - |
| dc.description.journalClass | 1 | - |
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