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Microemulsion 방법을 이용한 CMP용 CeO2/SiO2 나노 연마 입자의 제조
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Kwan Young Lee | - |
| dc.date.accessioned | 2021-09-02T09:27:11Z | - |
| dc.date.available | 2021-09-02T09:27:11Z | - |
| dc.date.created | 2021-04-22 | - |
| dc.identifier.uri | https://scholar.korea.ac.kr/handle/2021.sw.korea/74585 | - |
| dc.publisher | the Applied Rheology Center | - |
| dc.title | Microemulsion 방법을 이용한 CMP용 CeO2/SiO2 나노 연마 입자의 제조 | - |
| dc.type | Conference | - |
| dc.contributor.affiliatedAuthor | Kwan Young Lee | - |
| dc.identifier.bibliographicCitation | the 8th Annual Meeting of the Applied Rheology Center | - |
| dc.relation.isPartOf | the 8th Annual Meeting of the Applied Rheology Center | - |
| dc.citation.title | the 8th Annual Meeting of the Applied Rheology Center | - |
| dc.citation.conferencePlace | KO | - |
| dc.citation.conferencePlace | 서울 | - |
| dc.citation.conferenceDate | 2008-02-12 | - |
| dc.type.rims | CONF | - |
| dc.description.journalClass | 2 | - |
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