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A Front-side Dry-Etched Thermopile Detector with 3-5 ㎛ Infrared Absorber and Its Application to Novel NDIR CO2 Gas Sensors

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dc.contributor.authorMin Nam Ki-
dc.date.accessioned2021-09-02T12:02:49Z-
dc.date.available2021-09-02T12:02:49Z-
dc.date.created2021-04-22-
dc.identifier.urihttps://scholar.korea.ac.kr/handle/2021.sw.korea/75753-
dc.publisherIEEE Sensors in ITaly, 2008-
dc.titleA Front-side Dry-Etched Thermopile Detector with 3-5 ㎛ Infrared Absorber and Its Application to Novel NDIR CO2 Gas Sensors-
dc.typeConference-
dc.contributor.affiliatedAuthorMin Nam Ki-
dc.identifier.bibliographicCitationTHE SEVENTH IEEE CONFERENCE ON SENSORS-
dc.relation.isPartOfTHE SEVENTH IEEE CONFERENCE ON SENSORS-
dc.citation.titleTHE SEVENTH IEEE CONFERENCE ON SENSORS-
dc.citation.conferencePlaceIT-
dc.citation.conferenceDate2008-10-26-
dc.type.rimsCONF-
dc.description.journalClass1-
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