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A flexure guided stage with piezo electric transducers for laser micro/nano machining
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Jaehwa Jeong | - |
| dc.date.accessioned | 2021-09-02T18:30:03Z | - |
| dc.date.available | 2021-09-02T18:30:03Z | - |
| dc.date.created | 2021-04-22 | - |
| dc.identifier.uri | https://scholar.korea.ac.kr/handle/2021.sw.korea/79302 | - |
| dc.publisher | European Society for Precision Engineering and Nanotechnology | - |
| dc.title | A flexure guided stage with piezo electric transducers for laser micro/nano machining | - |
| dc.type | Conference | - |
| dc.contributor.affiliatedAuthor | Jaehwa Jeong | - |
| dc.identifier.bibliographicCitation | euspen 10th Anniversary International Conference & 10th Annual General Meeting | - |
| dc.relation.isPartOf | euspen 10th Anniversary International Conference & 10th Annual General Meeting | - |
| dc.relation.isPartOf | Proceedings of the euspen international conference | - |
| dc.citation.title | euspen 10th Anniversary International Conference & 10th Annual General Meeting | - |
| dc.citation.conferencePlace | SZ | - |
| dc.citation.conferenceDate | 2008-05-18 | - |
| dc.type.rims | CONF | - |
| dc.description.journalClass | 1 | - |
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