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Multiple Internal Reflection Fourier-Transform Infrared Spectroscopy and Its Application to ALD Mechanism Studies
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Yunsoo Kim | - |
| dc.date.accessioned | 2021-09-02T18:40:09Z | - |
| dc.date.available | 2021-09-02T18:40:09Z | - |
| dc.date.created | 2021-04-22 | - |
| dc.identifier.uri | https://scholar.korea.ac.kr/handle/2021.sw.korea/79382 | - |
| dc.title | Multiple Internal Reflection Fourier-Transform Infrared Spectroscopy and Its Application to ALD Mechanism Studies | - |
| dc.type | Conference | - |
| dc.contributor.affiliatedAuthor | Yunsoo Kim | - |
| dc.identifier.bibliographicCitation | 제34회 한국진공학회 동계학술대회 | - |
| dc.relation.isPartOf | 제34회 한국진공학회 동계학술대회 | - |
| dc.citation.title | 제34회 한국진공학회 동계학술대회 | - |
| dc.citation.conferencePlace | 용인 단국대학교 죽전캠퍼스 | - |
| dc.citation.conferenceDate | 2008-02-14 | - |
| dc.type.rims | CONF | - |
| dc.description.journalClass | 2 | - |
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