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Structural and optical analysis of ZnO thin film prepared by ALD at low temperature
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | BYUN, Dong Jin | - |
| dc.date.accessioned | 2021-09-02T18:49:22Z | - |
| dc.date.available | 2021-09-02T18:49:22Z | - |
| dc.date.created | 2021-04-22 | - |
| dc.identifier.uri | https://scholar.korea.ac.kr/handle/2021.sw.korea/79496 | - |
| dc.publisher | International Symposium on the Physics of Semiconductors and Applications (ISPSA) | - |
| dc.title | Structural and optical analysis of ZnO thin film prepared by ALD at low temperature | - |
| dc.type | Conference | - |
| dc.contributor.affiliatedAuthor | BYUN, Dong Jin | - |
| dc.identifier.bibliographicCitation | The 14th International Symposium on the Physics of Semiconductors and Applications | - |
| dc.relation.isPartOf | The 14th International Symposium on the Physics of Semiconductors and Applications | - |
| dc.relation.isPartOf | ISPSA | - |
| dc.citation.title | The 14th International Symposium on the Physics of Semiconductors and Applications | - |
| dc.citation.conferencePlace | KO | - |
| dc.citation.conferenceDate | 2008-08-26 | - |
| dc.type.rims | CONF | - |
| dc.description.journalClass | 1 | - |
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