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Fabrication of phase change memory device using nanoimprint lithography
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Lee, Heon | - |
| dc.date.accessioned | 2021-09-02T19:50:30Z | - |
| dc.date.available | 2021-09-02T19:50:30Z | - |
| dc.date.created | 2021-04-22 | - |
| dc.identifier.uri | https://scholar.korea.ac.kr/handle/2021.sw.korea/80160 | - |
| dc.publisher | Institute of Microelectronics, National Center for Scientific Research NCSR Demokritos | - |
| dc.title | Fabrication of phase change memory device using nanoimprint lithography | - |
| dc.type | Conference | - |
| dc.contributor.affiliatedAuthor | Lee, Heon | - |
| dc.identifier.bibliographicCitation | 34th Micro and Nano Engineering Conference MNE08 | - |
| dc.relation.isPartOf | 34th Micro and Nano Engineering Conference MNE08 | - |
| dc.citation.title | 34th Micro and Nano Engineering Conference MNE08 | - |
| dc.citation.conferencePlace | GR | - |
| dc.citation.conferenceDate | 2008-09-15 | - |
| dc.type.rims | CONF | - |
| dc.description.journalClass | 1 | - |
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