Detailed Information

Cited 0 time in webofscience Cited 0 time in scopus
Metadata Downloads

Downsizing gas sensors based on semiconducting metal oxide: Effects of electrodes on gas sensing properties

Authors
Song, Young GeunShim, Young-SeokKim, SangtaeHan, Soo DeokMoon, Hi GyuNoh, Myoung SubLee, KwangjaeLee, Hae RyongKim, Jin-SangJu, Byeong-KwonKang, Chong-Yun
Issue Date
9월-2017
Publisher
ELSEVIER SCIENCE SA
Keywords
Internet of things; Miniaturization; Gas sensor; Interdigitated electrodes; In2O3 nanocolumn
Citation
SENSORS AND ACTUATORS B-CHEMICAL, v.248, pp.949 - 956
Indexed
SCIE
SCOPUS
Journal Title
SENSORS AND ACTUATORS B-CHEMICAL
Volume
248
Start Page
949
End Page
956
URI
https://scholar.korea.ac.kr/handle/2021.sw.korea/82336
DOI
10.1016/j.snb.2017.02.035
ISSN
0925-4005
Abstract
We report the highly sensitive and selective downsized gas sensors for the IoT application. Sensing areas of Pt-interdigitated electrodes (IDEs) were varied to investigate the relation between sensing materials and electrodes. In2O3 nanocolumns were deposited on the pre-patterned Pt IDEs using glancing angle deposition (GLAD). The effect of the interface resistance between electrodes and sensing materials, and the intergrain resistance between nanocolumns is analyzed by linear regression at different sensing area and incident angle of GLAD. In2O3 (angle: 85 degrees, sensing area: 0.3 mm x 0.3 mm) nanocolumns with double Schottky barriers show the highest response and selectivity with fast response time of 10 s to VOCs among the samples fabricated in this study. The analysis reveals that the intrinsic response of In2O3 (angle: 85, sensing area: 0.3 mm x 0.3 mm) nanocolumns are dominantly affected by intergrain resistance, resulting in a high response. Our demonstration for the fundamental aspect of downsizing gas sensor makes an important contribution to the chemical sensor field with broad interest. (C) 2017 Elsevier B.V. All rights reserved.
Files in This Item
There are no files associated with this item.
Appears in
Collections
College of Engineering > School of Electrical Engineering > 1. Journal Articles
Graduate School > KU-KIST Graduate School of Converging Science and Technology > 1. Journal Articles

qrcode

Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.

Related Researcher

Researcher Ju, Byeong kwon photo

Ju, Byeong kwon
공과대학 (전기전자공학부)
Read more

Altmetrics

Total Views & Downloads

BROWSE